Модель равновесия подвижных элементов микромеханических зеркал с внутренними подвесами

И.Е. Лысенко

You are using an outdated browser Internet Explorer. It does not support some functions of the site.

Recommend that you install one of the following browsers: Firefox, Opera or Chrome.

Model of micromechanical mirrors mobile elements balance with internal suspension

Abstract

Model of micromechanical mirrors mobile elements balance with internal suspension

I.E. Lysenko

Incoming article date: 07.05.2013

The model of micromechanical mirrors mobile elements balance is developed. The received results of modelling of a micromechanical mirror are considered.

Keywords: microsystm technology, element base, model, modeling, mirror